Email: sales@runshengdcs.com
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Phone：+86 15383419322Description
The Applied Materials (AMAT) 0090-76110 is a high-performance VMEbus processor board engineered for real-time control in semiconductor fabrication equipment. As a critical component of AMAT’s 9900-series platform, this industrial-grade PCB delivers deterministic computing for plasma etch, CVD, and PVD tool controllers. Featuring a PowerPC-based processor with radiation-hardened components, the 0090-76110 operates reliably in high-EMI environments near RF generators and high-voltage power supplies. Its dual VME64x interfaces support 320 MB/s data transfer for synchronized motion control and process I/O management. With -40°C to +85°C operation and conformal-coated circuitry, the AMAT 0090-76110 maintains nanosecond-level timing precision in vacuum cluster tools, enabling sub-micron process accuracy. The board integrates ECC-protected DDR3 memory and watchdog timers to prevent wafer scrap during 24/7 fab operations, embodying AMAT’s legacy in mission-critical semiconductor automation.
0090-76110 VME PCB AMAT
Technical Specifications
| Parameter Name | Parameter Value |
| Product Model | 0090-76110 |
| Manufacturer | Applied Materials (AMAT) |
| Product Type | VMEbus Processor Board |
| Processor | Freescale PowerPC e6500 @ 1.8 GHz |
| Memory | 4GB DDR3 ECC SDRAM (Expandable) |
| VME Interface | Dual VME64x (Master/Slave) |
| Data Throughput | 320 MB/s (VME64x Mode) |
| Backplane Compatibility | VME64, VXS, VPX |
| Operating Temperature | -40°C to +85°C |
| MTBF | >250,000 hours (40°C) |
| I/O Interfaces | 2x GigE, 4x SATA, 8x GPIO |
| Power Requirement | +5V ±5% / 25A max |
| Cooling | Forced air (200 LFM min) |
| Dimensions | 233.35 x 160 mm (6U) |
| Certifications | SEMI S2/S8, CE, UL 61010-1 |
Main Features and Advantages
Deterministic Processing: Hardware-based real-time kernel executes control loops with <500ns jitter, critical for RF matching network tuning during etch processes.
Fault-Tolerant Architecture: Triple-redundant power inputs with auto-failover and ECC memory prevent single-point failures in 24/7 wafer fabs.
Enhanced Connectivity: Front-panel Gigabit Ethernet ports enable secure equipment data streaming to AMAT E3® or FabGuard® systems without backplane congestion.
Extreme Environment Operation: Gold-plated connectors and ceramic capacitors withstand sulfurized atmospheres in copper BEOL processes. Conformal coating protects against chemical vapors.
Legacy System Integration: Backward-compatible with AMAT Centura® and Endura® platforms via VME64 emulation mode, extending tool lifecycle.
Application Field
The AMAT 0090-76110 serves as the computational core in advanced semiconductor manufacturing tools. In dielectric etch systems, it synchronizes RF generators, throttle valves, and ESC temperature control for atomic-layer precision. For metal deposition tools, the board coordinates robotic wafer handling across load-lock and process chambers while managing precursor gas flows.
In 3D NAND production, it enables high-aspect ratio etch control through real-time adaptive tuning algorithms. The 0090-76110 is indispensable in MEMS fabrication where it maintains vacuum integrity through nanosecond-precise pump sequencing. Foundry applications leverage its temperature resilience for high-k metal gate deposition in 300mm furnaces. Unlike commercial VME boards, the Applied Materials 0090-76110 includes AMAT-proprietary libraries for SECS/GEM communication and fault detection classification (FDC) required in GigaFab environments.
0090-76110 VME PCB AMAT
Related Products
AMAT 0090-7156: Analog I/O board for 0090-76110 backplane integration
AMAT 0190-19056: VME chassis for 300mm tool controllers
AMAT 0010-75070: Power supply module compatible with 0090-76110
AMAT 0090-74432: Motion control card for robotic handlers
AMAT 0200-13729: Cooling assembly for high-power VME systems
AMAT 0090-76115: Enhanced version with FPGA co-processor
